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Chemistry and Lithography (Press Monograph)
Uzodinma OkoroanyanwuHow much do you like this book?
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Chemistry and Lithography provides a comprehensive treatment of the chemical phenomena in lithography in a manner that is accessible to a wide readership. The book presents topics on the optical and charged particle physics practiced in lithography, with a broader view of how the marriage between chemistry and optics has made possible the print and electronic revolutions of the digital age. The related aspects of lithography are thematically presented to convey a unified view of the developments in the field over time, from the very first recorded reflections on the nature of matter to the latest developments at the frontiers of lithography science and technology.Part I presents several important chemical and physical principles involved in the invention and evolution of lithography. Part II covers the processes for the synthesis, manufacture, usage, and handling of lithographic chemicals and materials. Part III investigates several important chemical and physical principles involved in the practice of lithography. Chemistry and Lithography is a useful reference for anyone working in the semiconductor industry.
Categories:
Year:
2011
Edition:
1
Publisher:
SPIE Press
Language:
english
Pages:
878
ISBN 10:
1118030028
ISBN 13:
9781118030028
Series:
SPIE Press Monograph'', PM192
File:
PDF, 22.64 MB
Your tags:
IPFS:
CID , CID Blake2b
english, 2011
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